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Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
· Flame-retardant (UL94V-0 compliant).
· Two types of fittings (face seal fitting and compression fitting) and female threads (Rc, NPT) are available.
· Moving the spring from the sliding part of the armature iron core to the body reduces the generation of particulate matter caused by contact with the spring.
· Improved sealing performance, securely sealing with its powerful spring.
· Power consumption: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (size 3).
*For DC specification / class B.
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Ships as soon as | Same Day |
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Stock Items Included
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.
Configure Now
Ships as soon as | 14 Days |
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SMC
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Configure Now
Ships as soon as | 89 Days |
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Vacuum Assist Valve - ZP2V Series
SMC
A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.
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Ships as soon as | Same Day |
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Stock Items Included
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Configure Now
Ships as soon as | 89 Days |
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SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.
Configure Now
Ships as soon as | 14 Days |
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Aluminum Manual Angle Valve with Bellows Seal - High Vacuum
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Configure Now
Ships as soon as | Same Day |
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Stock Items Included
Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
SMC
A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
[Features]
· An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
· Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
· Valve type: Normally closed (pressurize to open, spring seal).
Fluids: Nitrogen, air, inert gas.
· Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
· Weight: 0.5 kg.
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Ships as soon as | 14 Days |
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Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Configure Now
Ships as soon as | 29 Days |
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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Configure Now
Ships as soon as | 89 Days |
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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Configure Now
Ships as soon as | 14 Days |
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SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Configure Now
Ships as soon as | 89 Days |
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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Configure Now
Ships as soon as | 89 Days |
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Stainless Steel Valve, NW Flange Ball Valve for Vacuum
Consuss
If the need is for the MISUMI lowest cost vacuum valve, use CONSUSS.
This offers a vacuum valve with high quality and low cost.
Configure Now
Ships as soon as | 4 Days |
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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
SMC
A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.
Configure Now
Ships as soon as | 89 Days |
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Electromagnetic Valve for High Vacuum HVB6· 712 Series
CKD
This is an electromagnetic valve for high vacuum and it provides high vacuum maintaining force and excellent durability. Can be used for back pressure.
Configure Now
Ships as soon as | 12 Days |
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Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Configure Now
Ships as soon as | 89 Days |
---|
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Configure Now
Ships as soon as | 89 Days |
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Brand |
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Product Series |
CAD |
Days to Ship |
Type |
Application |
Installation Method |
Number of Ports |
Solenoid Type |
Switching Type |
Electromagnetic Valve Drive Type |
Effective Sectional Area(mm2) |
Piping Opening |
Nominal Designation of Piping Thread |
Connection Tube Diameter |
Flange Type |
Flange Size Nominal |
Flow Coefficient (Cv) |
Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | Consuss | SMC | CKD | SMC | SMC |
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Product Series | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | |||||||||
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Days to Ship |
Same Day Stock Items Included | 14 Days | 89 Days |
Same Day Stock Items Included | 89 Days | 14 Days |
Same Day Stock Items Included | 14 Days | 29 Days | 89 Days | 14 Days | 89 Days | 89 Days | 4 Days | 89 Days | 12 Days | 89 Days | 89 Days |
Type | Electromagnetic valve used under high vacuum | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | Solenoid Valve | Air-Actuated Vacuum Valve | Manual Vacuum Valve | Manual Vacuum Valve | Manual Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Manual Vacuum Valve | Electromagnetic valve used under high vacuum | Electromagnetic valve used under high vacuum | Electromagnetic valve used under high vacuum | Pilot Vacuum Valve |
Application | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating |
Installation Method | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct |
Number of Ports | 2-Port Valve | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | - | 3-Port Valve | - | 2-Port Valve | 2-Port Valve |
Solenoid Type | Single | Single | - | - | Single | - | - | - | - | - | - | - | - | - | Single | Single | Single | - |
Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | - | 2-Position Normally Closed | - | 2-Position Normally Closed | 2-Position Normally Closed |
Electromagnetic Valve Drive Type | Directly Operated | - | - | - | Directly Operated | - | - | - | - | - | - | - | - | - | Air Pilot | - | Directly Operated | - |
Effective Sectional Area(mm2) | - | - | - | 0.07 ~ 0.78 | - | - | - | 4.6 | - | - | - | - | - | - | - | - | - | - |
Piping Opening | RC / NPT / Face Seal Fitting / Compression Fitting | Flange | Flange | M / RC / NPT / One-Touch Pipe | Flange | Flange | Flange | Bite type Fittings | Flange | Flange | Flange | Flange | Flange | Flange | Flange | - | Flange | Flange |
Nominal Designation of Piping Thread | 1/8 / 1/4 / 3/8 | - | - | M5 / 1/8 / M6 / M8 | - | - | - | 1/4 | - | - | - | - | - | - | - | - | - | - |
Connection Tube Diameter | - | - | - | ø4 / ø6 | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
Flange Type | - | NW / Other | KF / K | - | KF | NW / Other | KF | - | KF / CF | KF | KF | KF / K | KF | NW | NW | - | KF / K | KF / K / CF |
Flange Size Nominal | - | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | - | 16 / 25 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | - | 16 / 25 / 40 / 50 | 16 / 25 / 40 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 80 | 16 / 25 / 40 / 50 / 80 | 25 / 40 / 50 | 16 / 40 | - | 25 / 40 / 50 / 80 | 25 / 40 / 50 / 63 |
Flow Coefficient (Cv) | - | - | - | 0.0037940379 ~ 0.0422764228 | - | - | - | 84.87 | - | - | - | - | - | - | - | - | - | - |
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